A new R&D centre has opened at the Albany NanoTech Complex in New York, expanding semiconductor cleanroom capacity at the NY Creates site.
NY Creates is a state-backed, non-profit organisation operating shared cleanroom facilities and pilot-scale R&D infrastructure for industry and academic partners.
The expansion is anchored by the NanoFab Reflection (NFR) facility, a 310,000 sqft building that includes approximately 50,000 sqft of advanced cleanroom space designed for next-generation semiconductor process development.
The cleanroom expansion was delivered by a DPS Group and Gilbane joint venture as design-build contractors.
The facility will house the NY Creates EUV Lithography Center, supporting both standard numerical aperture EUV lithography and future High-NA EUV capability, expected to come online in late 2026.
Lithography tools and subsystem components for High-NA development are already being delivered and assembled inside the cleanroom.
The cleanroom will support advanced process integration across wet etch, cleaning, coat/develop, anneal and imaging technologies.
Japanese semiconductor manufacturer SCREEN ATCA will establish an on-site R&D presence focused on these process steps.
The collaboration is intended to align US and Japanese semiconductor R&D activity within a shared cleanroom platform.
This will support process development at advanced nodes for high-performance computing, artificial intelligence and next-generation electronics.
Albany NanoTech is one of the largest non-profit semiconductor R&D cleanroom facilities in the US, providing shared infrastructure for pilot-scale fabrication, EUV research and device prototyping.
The wider campus forms part of a multi-phase expansion of US semiconductor R&D infrastructure.
In May 2022, NY Creates opened bids for the 50,000 sqft cleanroom expansion.
“The opening of SCREEN ATCA marks yet another major milestone for New York’s globally-recognised semiconductor manufacturing industry,” said New York Governor, Kathy Hochul.
“With SCREEN ATCA now operational at our Albany NanoTech Complex, we are unlocking exciting opportunities for collaboration, reflecting a shared commitment to catalyse semiconductor innovation in New York,” said Dave Anderson, NY Creates President and CEO.