Nanovea engineers design Class 1 cleanroom standard optical profiler
Nanovea, the US manufacturer of instruments for indentation, scratch, wear, friction and 3D non-contact profilometry testing, has installed an optical profiler within the Class 1 Cleanroom of a leading micro-electronics manufacturer.
Nanovea’s engineers demonstrated their ingenuity by custom-designing a system that was compatible with the strict Class 1 standards. The material selection was crucial in the design of the X-Y stages so that few particles are emitted into the air during testing, the company said.
The system also has a high degree of flatness, accuracy and a level of automation that allows the user to measure multiple areas and stitch them together. This lets the user create one large, planar surface in order to compare relative flatness with very little user interaction.
The measurable area of the custom profiler can be as large as 30 x 30cm with vertical resolution down to 2nm. A design is also available to scan large, heavy and even immoveable parts.
Nanovea’s engineers have also provided a custom built high-speed profiler with speeds over 30,000 points/second and machine vision with image recognition to improve efficiency. Additionally, profilers have been built with custom scanning capabilities to acquire surface measurements from both the top and bottom surfaces while measuring the thickness of the material, all with nanometer resolution.