MET ONE 6000 series meets challenge of particle monitoring for fabs

Published: 23-May-2008

While mini-environments are commonly employed in fabs, there remains the need for constant particle monitoring due to continued miniaturisation. The MET ONE 6000 Series Remote Airborne Particle Counter introduced by Hach Ultra is designed to meet the specific needs of cleanroom operations within the semiconductor, hard disk drive and flat panel display industries.


The challenges of new processes and finer geometries, for example, require sampling rates of 1cfm at the 65nm node. The need for reliability, ease of maintenance and low CoO while meeting new cleanroom requirements is ever present..

With a sensitivity range of 0.2 to 5.0µm at 0.1 cfm flow rate and 0.5 to 10µm at 1.0 cfm flow rate, the MET ONE 6000 series offersWhile mini-environments are commonly employed in fabs, there remains the need for constant particle monitoring due to continued miniaturisation. The MET ONE 6000 Series Remote Airborne Particle Counter introduced by Hach Ultra is designed to meet the specific needs of cleanroom operations within the semiconductor, hard disk drive and flat panel display industries.While mini-environments are commonly employed in fabs, there remains the need for constant particle monitoring due to continued miniaturisation. The MET ONE 6000 Series Remote Airborne Particle Counter introduced by Hach Ultra is designed to meet the specific needs of cleanroom operations within the semiconductor, hard disk drive and flat panel display industries. accurate and reliable continuous particle monitoring. It also offers diagnostic features that provide reduced troubleshooting and downtime-related costs.

With communication options such as RS485 Serial Modbus, Ethernet, Analog, Pulse and RS232, the MET ONE 6015 is easy to integrate with any facility monitoring system and enables future upgrading as the communication needs of a facility change.

These communication choices and an array of mechanical installation options also reduce downtime related to instrument removal and re-installation during routine calibration and preventative maintenance work.

The use of a ‘Long Life Laser’ diode reduces the need for replacement parts and the overall cost of ownership. Instrument can be diagnosed for flow, sensor, communication failures, and count alarm or count alert through built-in or external light stack. These additional diagnostic features provide faster troubleshooting and reduced downtime.

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In regulated manufacturing, monitoring environmental conditions and critical equipment is essential to protect product quality, yield, and patient safety. Facilities often use a Facility Monitoring System (FMS) to track factors like airborne particles, temperature, and humidity. Beyond regulatory compliance, FMS delivers real business value through reduced waste, improved yield, higher quality, and greater profitability

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