IMEC starts work on 300mm facility

Europe's largest independent research centre in the field of microelectronics, nanotechnology, enabling design methods and technologies for ICT systems, the Interuniversity MicroElectronics Center (IMEC), has started construction of a new 300mm cleanroom.

The organisation says the decision to go ahead with the project was made following positive signals from the industry and local government support for its 300mm silicon research platform initiative. Construction of the new 2.200m² research fab began last month with completion due in approximately 18 months. The facility is expected to go on-line in mid-2005 with activities gradually ramping up. The initiative involves an investment of €84 million of which €37.184 million has been granted by local government. The new fab will be located adjacent to IMEC's existing facilities at Leuven, Belgium, "to ensure and optimise the exchange of information and to share common facilities, infrastructure and metrology tools." IMEC says it will set up several research programmes targeting the most important issues identified by the International Technology Roadmap for Semiconductors for the sub-45nm node. The focus will be on EUV lithography, new materials, advanced devices and innovative interconnect schemes. The programmes will be open for semiconductor companies and material and equipment suppliers worldwide. "We've received very strong signals from the industry worldwide that they wish to continue collaboration with IMEC in pioneering research for the 300mm era," said Professor Gilbert Declerck, president and CEO. "This 300mm research facility will allow us to fulfil the requests by the industry to perform world-class research on the most advanced process steps, materials and devices for the sub-45nm node and around, above and beside CMOS."