Daw 300mm fabs system
US-based Daw Technologies, Inc has introduced a new wall, floor and ceiling systems designed for 300mm semiconductor cleanrooms.
The new system includes the Network 306 wall, Matrix 407 floor and AirFrame 509 ceiling systems. "We saw a great need to develop a new set of products specifically for 300mm fabs," said Pete Spransy, vice-president of research and development. "This new set of products will be the standard for 300mm cleanroom products and are found nowhere else in the industry. "Tools used for 300mm wafer processing are becoming much taller and heavier, requiring more structural ceiling and floor systems in addition to higher walls. We have successfully designed a unique product set for both new 300mm fabs as well as an upgrade system for existing 200mm fabs. The first "retro-fit" has just been carried out for Micron in Virginia where Daw says it was able to quickly upgrade Micron's 200mm facility saving the customer an estimated $3 million as well as significant ramp up time. The NetWork 306 wall system is a batten-less aluminum honeycomb wall system with an internal splice that divides the wall into upper and lower panels. The upper panel hangs from the headtrack allowing the lower panel to be removed for tool move-in. Daw says the time savings derived from this feature combined with a batten-less type wall are significant. To date, the company has provided walls up to 5.5m high, but the system allows for even higher applications. The Matrix 407 raised-access floor panel is rated for 3,000 lb (1,360 kg). Its most unique feature is said to be that it is made from extruded aluminum. Daw says the failure mode of die-cast aluminum material is catastrophic, whereas extruded aluminum bends but does not break. The floor can be used in specific move-in paths or over the entire floor area. The AirFrame 509 ceiling is designed specifically for attaching AMHS. It has a continuous slot in the bottom of the grid compatible with Bosch 1/4-turn nuts. The patented cam-lock connection for the intersections is said to dramatically simplify installation, reducing install time by nearly a third.