Airkey, a China-based specialist in cleanroom design and modular construction, has completed a 1,000 sqm cleanroom facility for a domestic optoelectronic semiconductor manufacturer in China.
The project gives the manufacturer a notable step up in cleanroom technology for light-sensitive semiconductor production.
The new facility incorporates a multi-class modular cleanroom design, featuring an ISO Class 6 (Class 1,000) background cleanroom environment that houses ISO Class 4 (Class 10) and ISO Class 5 (Class 100) modular rooms for critical manufacturing processes.
This flexible and layered configuration enables both large-volume production and ultra-clean areas for sensitive operations.
This flexible and layered configuration enables both large-volume production and ultra-clean areas for sensitive operations
A key feature of the ISO Class 6 area is an advanced double-ceiling and plenum column system that ensures highly efficient airflow recirculation.
The double-ceiling structure, combined with air return walls, maintains stable temperature and humidity, crucial factors for optimising semiconductor yields, while concealing HVAC ducting and water pipes for a clean, organised workspace.
Temperature, humidity, and differential pressure are managed through a modular HVAC system, with each cleanroom fitted with an independent intelligent control panel capable of real-time monitoring and adjustment.
The cleanrooms’ construction utilises aluminium alloy frames and 50mm and 75mm thick rock wool sandwich panels, delivering enhanced thermal insulation, acoustic performance, and structural stability.
The new facility incorporates a multi-class modular cleanroom design
Fire safety has also been carefully integrated into the cleanroom complex, featuring an embedded fire protection system with early smoke detection, concealed sprinklers, and a dedicated smoke exhaust system, all designed to minimise particulate generation and contamination risk.
To maintain strict separation of personnel and material flow, each cleanroom includes an air shower for personnel entry, an air lock room for exit, as well as a buffer room and pass box for materials transfer, and a dedicated air lock for finished goods.
This controlled layout is critical in preventing cross-contamination within high-specification cleanrooms.
Within the Class 6 cleanroom, the Class 4 and 5 cleanrooms incorporate additional innovations to support energy-efficient, precision manufacturing.
A key feature of the ISO Class 6 modular cleanrooms is an advanced double-ceiling and plenum column system
These include the use of EC Fan Filter Units (FFUs), which provide higher air volumes and air change rates while consuming 20%-40% less energy than traditional AC motors.
Notably, EC FFUs also operate at least 10 dB quieter, improving the operational environment in facilities requiring large quantities of ceiling-mounted FFUs.
An energy-saving airflow strategy sees the Class 4 and 5 cleanrooms draw pre-filtered air directly from the surrounding ISO 6 environment, reducing operational costs while upholding stringent cleanliness standards.
Specialised materials have been selected to suit the highly sensitive nature of semiconductor production.
An energy-saving airflow strategy sees the ISO Class 4 and ISO Class 5 cleanrooms draw pre-filtered air directly from the surrounding ISO 6 environment
The ISO Class 4 cleanroom is enclosed primarily by yellow light glass, which filters out specific light wavelengths that could damage photoresist materials during optoelectronic processes.
White acrylic and transparent acrylic panels are also utilised in specific areas, combining practicality, privacy, and enhanced illumination.
All cleanroom classes within the new facility are equipped with ESD PVC flooring, providing both static protection and cleanroom-grade surface characteristics, an increasingly specified solution for advanced semiconductor and optoelectronic manufacturing.
The project was completed on schedule despite the technical complexities involved, with Airkey leveraging its extensive expertise in semiconductor cleanroom construction.
Top image: The new facility incorporates a multi-class modular cleanroom design