TSI, a US-based precision measurement and data-driven solutions company, has unveiled TSI Nano LPM (trademarked) System.
This groundbreaking technology marks a significant advancement in ultrapure water (UPW) monitoring for the semiconductor industry, solving the challenge of detecting particles at an unprecedented 10 nanometer (nm) level.
By providing continuous and reliable monitoring of UPW quality, the Nano LPM System enables semiconductor manufacturers to make real-time, data-driven decisions before product quality and yield are compromised.
In semiconductor manufacturing, UPW plays a crucial role in various processes, including wafer and equipment cleaning, etching, and contaminant removal.
The presence of particles as small as 10 nm can directly impact yield, making precise and immediate detection a necessity.
In semiconductor manufacturing, UPW plays a crucial role in various processes
Traditional optical technologies have struggled to detect nanoparticles below 20 nm due to refractive index limitations and interference from microbubbles, often resulting in inconsistent or inaccurate readings.
TSI’s Nano LPM System overcomes these challenges with a patented approach that ensures accurate detection of 10 nm particles, offering semiconductor facilities a robust and reliable monitoring solution.
At the core of the Nano LPM System is the Nano LPM Particle Generator, which aerosolises UPW, effectively drying droplets and isolating solid nanoparticles.
These isolated nanoparticles are then analysed using the Nano LPM Water-Based Condensation Particle Counter (CPC), specifically optimised for cleanroom environments.
By providing continuous and reliable monitoring of UPW quality, the Nano LPM System enables semiconductor manufacturers to make real-time, data-driven decisions before product quality and yield are compromised
This innovative process guarantees a new level of accuracy and reliability in UPW monitoring, setting a new industry standard.
“TSI’s Nano LPM System represents a significant leap forward for semiconductor manufacturers who need reliable, real-time UPW monitoring at the 10 nm level,” said Ketan Mehta, VP of Product Management and Marketing at TSI. “We’re proud to offer a groundbreaking technology that not only ensures compliance but also elevates product quality and yield, transforming environmental control into a critical advantage for our customers.”