IMEC extends collaboration with ASML

Published: 9-Feb-2004


IMEC, Europe's largest independent microelectronics and nanotechnology research centre, has extended its long-term collaboration with ASML to immersion lithography and will launch an industrial affiliation program (IIAP) on 193nm liquid immersion lithography that will run in parallel with its 157nm lithography IIAP. "This agreement is an important step in the long-term strategic partnership with ASML that started many years ago on 248nm lithography, succeeded by 193nm and 157nm programs," said Luc Van den hove, Vice President Silicon Process and Device Technology at IMEC. "For each generation, a first-of-a-kind prototype full-field stepper or scanner from ASML was installed. These tools formed the high-performance centrepieces for these programs. IMEC and ASML intend to continue this partnership with follow-on programs on 193nm immersion and, in due course, EUV lithography. With this agreement, ASML becomes a strategic partner within IMEC's 300mm research. ASML's immersion tool, the TWINSCAN XT:1250i, which is planned for installation in our new 300mm cleanroom during Q4 2004 , will be the first step, enabling us to build our sub-45nm research platform around the world's most advanced lithography clusters." "ASML has been collaborating with IMEC on advanced lithography processes for many years. The partnership provides ASML with valuable, early feedback from IMEC members, some are also ASML customers, which enables us to speed products to market. In exchange, IMEC members benefit from early access to new processes and a faster learning curve once new products are installed in their facilities," said Martin van den Brink, executive vice president, marketing and technology, ASML. IMEC is inviting participation in the program by semiconductor manufacturers, material suppliers, mask shops and peripheral lithography equipment suppliers. IMEC Industrial Affiliation programs offer partners the advantages of both reduced costs and early process knowledge.

T: +32 16 28 18 80 katrien.marent@imec.be

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