Following the footprint

Published: 17-Aug-2006


The Veriflo division of Parker Hannifin has launched a point-of-use pressure regulator for valve manifold box or panel applications that has a compact footprint of just 1.25 square inches (31.75 mm).

Designed to pressure control high-purity gases by distributing them to tools or locations in semiconductor fabs and high-technology manufacturing sites and laboratories, the VMB regulator offers a Cv of 0.1 and an ability to accommodate inlet pressures to 500 PSIG (35 BarG).

Employing a spherical Inconel poppet design that self-centres for repeatable positive closure, the VMB accommodates inlet pressures up to 500 PSIG (35 BarG) and can be specified in versions with outlet pressure ranges of 1-30, 1-60, 2-100 or 3-250 PSIG (from 2 to 17 BarG).

A threadless style, non-tied, double-diaphragm regulator, it has been designed using the same dimensions as Veriflo’s well-known Quantum valves and SQMicro regulators, thus allowing gas suppliers and panel builders to minimise the space required in the cleanroom. It operates over a -40 to +150°F (-40 to +66°C) temperature range.

Fabricated from 316L stainless steel and featuring Hastelloy C-22 diaphragms, the regulator is available with either tube stub or face seal connections. The standard surface finish is 10 micro-inches (0.254mm) or less, although a 5 micro-inch (0.127mm) finish or less is available on request.

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