Entegris expands VaporSorb filter for advanced yield protection in semiconductor processing

Entegris, a US developer of protective products for transporting critical materials used in the semiconductor and other high-tech industries, has broadened its VaporSorb line of airborne molecular contamination (AMC) filters used in cleanrooms and in semiconductor manufacturing.

The new VaporSorb TRK includes a unique material to allow it to become the first single filter to capture not only the top three core contaminant classes, but also the fourth, a group defined as weak acids.

Designed specifically for photolithography coater/developer tracks, the new filter was created as a 'four-in-one' solution to avoid the complexities of multi-filter handling and to build on the previous 'three-in-one' technology.

'Today's photolithography yield concerns can begin to be alleviated by addressing the one potential contaminant class that has to be addressed, and that is weak acids,' said Joe Wildgoose, Senior Product Marketing Manager for Entegris AMC Filtration Services.

'With VaporSorb TRK, we not only have a single solution that addresses the three common major concerns, but also the newest and latest concern regarding weak acidic airborne contaminants.'

Examples of weak acids include acetic and formic acids and nitrous acid. These contaminants are causing concerns regarding defects and yield in photolithography processing, since they are not removed by traditional AMC filters and, furthermore, may be formed from organic contamination when using traditional filter designs.

VaporSorb filters use a unique mix of materials to capture airborne molecular contaminants. The mix was improved by adding a new adsorbent to create the new four-in-one filter. In-field, end-user testing has confirmed that the filter is capable of capturing all organics, bases, strong acids and weak acids that cause wafer or equipment defects.