Entegris, a US provider of contamination control products and materials handling technologies for advanced manufacturing environments, has introduced the Torrento X Series 7nm filters with FlowPlane linear filtration technology.
The company says FlowPlane is the semiconductor industry’s first scalable, linear, high-flow filtration platform enabling advanced wet cleaning applications for the 10nm node and beyond.
The first in a series of filters based on linear filtration technology, the FlowPlane S model is for point of dispense (POD) applications, enabling improvements in both on-wafer defects and yield for critical wet cleaning applications.
Clint Haris, Vice-President of the Liquid Microcontamination Control business unit at Entegris, said: 'Filter design must evolve to meet the needs of the most complex semiconductor manufacturing processes. A filter is the last line of defence to prevent defect-causing contaminants from reaching the wafer. Our smaller, more powerful filtration solution will enable our customers to effectively implement their 10 and 7nm technology nodes.'
Torrento X series 7nm filters with FlowPlane linear filtration technology improve retention and increase flow rate performance by 100% compared with similarly sized radial filters, the company said.