Ebara and Genesis sign pumps deal

Published: 5-Aug-2005


German company Ebara Precision Machinery Europe (EPME) and Genesis Vacuum Technologies, of Sacramento, US, have signed a co-operation agreement for cryogenic vacuum pumps and cryogenic coldheads that will see EPME become the exclusive sales and service representative for the products in Europe.

Cyrogenic pumps and coldheads are used for generating ultra-high vacuum conditions in environments requiring high levels of cleanliness, particularly for the semiconductor and disk drive industries. Genesis cryopumps are available in a variety of sizes ranging from four to 12 inch diameter, with most sizes available in either an "upright" or "low profile" package. They feature the largest process gas capacities available, have a variable speed, three phase motor control to enhance performance during standard operation, and full or quick regenerations. Each size and model of pump can be configured for high vacuum, UHV, or sputtering applications. They are available in a basic pump configuration or in a fully automated quick regeneration pump package.

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