Akrion sells another BeOL wafer system

Published: 2-Feb-2005


Akrion has sold a single wafer cleaning system to a customer in Asia. The Goldfinger Mach2HP system will include four process chambers and utilise patented Goldfinger megasonic and Sahara drying technologies. It will be used for back-end-of-line post etch/ash cleaning for 130nm and 90nm device technology. Akrion has sold more than a dozen Mach2/Mach2HP systems worldwide since entering the single wafer equipment sector in April 2004.

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