‘Working with key customers in the semiconductor, solar, fuel cell, glass coating, r&d and other markets, we’ve applied our application knowledge to develop the DLI vaporiser,’ said Ed Fisher, solutions manager at Brooks Instrument.
‘Each is easily customisable and overcomes the operational limitations of conventional vaporising technologies such as bubblers or vapour draw systems and flash vaporisers. Additionally, none of the conventional vaporiser technologies can eliminate the potential for liquid carry-over and its attendant problems like a DLI vaporiser.’
Brooks offers vaporiser designs to accommodate a wide range of liquid properties: low vapour pressures (sub 1 torr), low flow rates (sub 5g per hour), and high flow rates (more than 15kg/hr). Unlike bubblers and hot-surface vaporisers, the company says the DLI vaporisers are very efficient at producing vapour from liquid. www.BrooksInstrument.com