CEA-Leti has officially inaugurated the FAMES Pilot Line, featuring a 2,000 sqm cleanroom.
The facility, which expands CEA-Leti’s total cleanroom space to 14,000 sqm, is designed to support the development and prototyping of advanced FD-SOI, RF, embedded memory, 3D integration, and power management technologies.
What is unique about the new cleanroom?
The facility is open-access, enabling European startups, SMEs, industrial groups, and research organisations to prototype, qualify, and de-risk cutting-edge semiconductor technologies before industrial deployment.
The cleanroom houses more than 80 of the most sophisticated 300mm tools in the industry.
Two basement levels manage complex technical installations, while a five-meter ceiling height accommodates large-scale equipment.
Low vibration levels and dedicated electrical backup systems ensure uninterrupted operation, critical for precision semiconductor fabrication.
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