ISO 14644-Part 13 ‘Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications’1 addresses the subject of cleaning cleanroom surfaces to remove particles (surface, in this context, refers to any solid object, work surface or item of equipment). Cleaning is an essential element of contamination control, and particles can cause significant damage to delicate materials and electronic components.
To put the new standard in context, ISO 14644 is a set of cleanroom standards (for which there are currently 12 active parts, in addition to the draft discussed in this article). The first part of the standard to appear was for the classification of cleanrooms in relation to particle air cleanliness, which was issued in 1999 (and subsequently revised in 2015).2
The standard, as one of the ISO series, can be applied to any sector. However, its foremost application is in the electronics and semiconductor industries. The standard does not, for example, refer to any microbiological aspects.
Not yet a Subscriber?
This is a small extract of the full article which is available ONLY to premium content subscribers. Click below to get premium content on Cleanroom Technology.
Subscribe now Already a subscriber? Sign in here.